Institute for Physics
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Item type:Publication, Stress induced degradation in RF deposited Ta/sub 2/O/sub 5/ films on silicon(IEEE, 2002) ;Novkovski, N. ;Pecovska-Gjorgjevich, M. ;Atanassova, E.Dimitrova, T. - Some of the metrics are blocked by yourconsent settings
Item type:Publication, Stress induced degradation in RF deposited Ta/sub 2/O/sub 5/ films on silicon(IEEE, 2000) ;Novkovski, N. ;Pecovska-Gjorgjevich, M. ;Atanassova, E.Dimitrova, T. - Some of the metrics are blocked by yourconsent settings
Item type:Publication, Stress Degradation of Low Field Leakage in Alumina Gate MOS Structures Containing RF Magnetron Sputtered Thin Ta2O5 Films on Silicon(Wiley, 1999-04) ;Novkovski, N. ;Pecovska-Gjorgjevich, M. ;Atanassova, ElenaDimitrova, T.
