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  5. Conduction mechanisms in thin RF sputtered Ta/sub 2/O/sub 5/ films on Si and their dependence on O/sub 2/ annealing
Details

Conduction mechanisms in thin RF sputtered Ta/sub 2/O/sub 5/ films on Si and their dependence on O/sub 2/ annealing

Journal
2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)
Date Issued
2002
Author(s)
Paskaleva, A.
Atanassova, E.
Novkovski, N.
Pecovska-Gjorgjevich, M.
DOI
10.1109/MIEL.2002.1003367

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