Electrical properties of thin RF sputtered Ta2O5 films after constant current stress

Journal

Microelectronics Reliability

Date Issued

2003-02

Author(s)

Pecovska-Gjorgjevich, M.

Novkovski, N.

Atanassova, E.

DOI

https://doi.org/10.1016/S0026-2714(02)00326-8