Density and spatial distribution of MERIE-like plasma induced defects in SiO2

Journal

physica status solidi (a)

Date Issued

2003-09

Author(s)

Paskaleva, A.

Novkovski, N.

Atanassova, E.

Pecovska-Gjorgjevich, M.

DOI

https://doi.org/10.1002/pssa.200306660