Oxygen annealing modification of conduction mechanism in thin rf sputtered Ta2O5 on Si

Journal
Solid-State Electronics
Date Issued
2002-11
Author(s)
Atanassova, E
Paskaleva, A
Pecovska-Gjorgjevich, M
DOI
https://doi.org/10.1016/S0038-1101(02)00134-X